Technology overview
Technology
Mears Silicon Technology (MST®): a quantum-engineered epitaxial silicon film that improves transistor performance and reliability.
The problem MST solves
Engineers dopants & profiles that survive downstream thermal cycles
MST enables high thermal budget dopant engineering, improving transistor performance and reliability across many product families.
Full node
of PPAC improvement without physical scaling
No design changes
MST is a unit process step that doesn't affect anything else
Existing EPI reactors
Simple upgrade, no impact on maintenance
MST properties & uses
What MST does inside the transistor
Research & development
R&D is silicon proven
Silicon data from industry and academic leaders validates MST across devices and customer processes. R&D continues on new applications and new MST films.
Work with us
Partner with Atomera
Evaluate MST in your own process and devices with Atomera's engineering team.
Contact us